Facet dependent reactivity and selective deposition of nanometer sized Β-SiC on diamond surfaces

dc.contributor.author Jiang, X.
dc.contributor.author Srikanth, V. V.S.S.
dc.contributor.author Zhao, Y. L.
dc.contributor.author Zhang, R. Q.
dc.date.accessioned 2022-03-27T04:03:52Z
dc.date.available 2022-03-27T04:03:52Z
dc.date.issued 2008-07-01
dc.description.abstract Selective deposition of nano- Β-SiC on non-{100} diamond faces has been observed in a microwave plasma chemical vapor deposition process due to the presence of Si (C H3)4 in the gas phase. The process allows only the growth of diamond starting crystals whose [001] is normal to the film surface and interrupts the growth of otherwise oriented grains; this is due to the preferential deposition of Si H3 on {111} diamond but not on {001} diamond according to additional theoretical reactivity analysis of the gas species on the exposed diamond surfaces. The facet dependent reactivity facilitates control of diamond/ Β-SiC nanocomposite film growth. © 2008 American Institute of Physics.
dc.identifier.citation Applied Physics Letters. v.92(24)
dc.identifier.issn 00036951
dc.identifier.uri 10.1063/1.2944143
dc.identifier.uri http://aip.scitation.org/doi/10.1063/1.2944143
dc.identifier.uri https://dspace.uohyd.ac.in/handle/1/6125
dc.title Facet dependent reactivity and selective deposition of nanometer sized Β-SiC on diamond surfaces
dc.type Journal. Article
dspace.entity.type
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