Optimization and analysis of piezoelectric and electrode materials' thickness effects on the performance of film bulk acoustic resonator

Abstract

This paper reports the behavior of the FBAR and its performance due to change of materials and their thicknesses. The resonance of the resonator depends on the thickness of the piezoelectric thin film acoustic resonator. The confinement of the acoustic wave in resonator depends on the electrode thickness and materials. Here such materials effects and the geometric effects are studied. It is found that acoustic properties of all the layers influences the resonator performance, with increased resonance frequency results from thinner electrodes, as it decreases the mass loading effect of resonator's electrodes and uses high longitudinal velocity of the piezoelectric materials. © 2012 IEEE.