Thermodynamic aspects of diamond/β-SiC composite films
Thermodynamic aspects of diamond/β-SiC composite films
| dc.contributor.author | Srikanth, Vadali V.S.S. | |
| dc.contributor.author | Trindade, Vicente Braz | |
| dc.contributor.author | Staedler, Thorsten | |
| dc.contributor.author | Jiang, Xin | |
| dc.date.accessioned | 2022-03-27T04:03:52Z | |
| dc.date.available | 2022-03-27T04:03:52Z | |
| dc.date.issued | 2008-04-01 | |
| dc.description.abstract | A thermodynamic equilibrium analysis involving H2-CH 4-Si(CH3)4 (tetramethylsilane, TMS) gas mixtures is made to understand the evolution of major gas-phase species and to predict the solid-phase co-deposition of diamond and β-SiC phases. The equilibrium compositions are analyzed at the practical deposition conditions of nanocrystalline diamond/β-SiC composite films. The influence of various predominant species on the equilibrium compositions is investigated. © 2008 WILEY-VCH Verlag GmbH & Co. KGaA. | |
| dc.identifier.citation | Chemical Vapor Deposition. v.14(3-4) | |
| dc.identifier.issn | 09481907 | |
| dc.identifier.uri | 10.1002/cvde.200706673 | |
| dc.identifier.uri | https://onlinelibrary.wiley.com/doi/10.1002/cvde.200706673 | |
| dc.identifier.uri | https://dspace.uohyd.ac.in/handle/1/6126 | |
| dc.subject | Co-deposition | |
| dc.subject | Diamond | |
| dc.subject | Silicon carbide | |
| dc.subject | Thermodynamics | |
| dc.title | Thermodynamic aspects of diamond/β-SiC composite films | |
| dc.type | Journal. Article | |
| dspace.entity.type |
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