Self aligned MEMS based high-Q disk resonator

Abstract

This paper presents the design of a RF MEMS based disk resonator with high quality factor in the MHz frequency range. High quality factors can be achievable with crystal and SAW devices. But these are off chip components that cannot be miniaturized further to achieve integration with integrated circuits. Hence there is a need for on-chip replacement. It can be achieved by the integration of MEMS disk resonators as they are planar resonators, capable of giving high quality factors in MHz range. This work is focused on investigating the role of basic physical and mechanical properties such as Density, Poisson's ratio, Young's modulus, Acoustic velocity and Acoustic impedance of various materials and geometric parameters, (i.e. radius of the disk and thickness of the disk) on the resonant frequency and Q value of the disk resonators. By proper optimization of these parameters, high quality factor has been achieved. By studying the relative importance of each of these factors, some new combination of materials to improve performance and reliability of planar resonators has been suggested. © 2012 IEEE.