The Effects of a Coated Material Layer on High-Overtone Bulk Acoustic Resonator and its Possible Applications

Abstract

This article describes the characterization and analysis of the effects an additional polymer layer has on a high-overtone bulk acoustic wave resonator based on Ba0.5Sr0.5TiO3 (BSTO) thin film by studying its spectral information. From both the simulation (numerical model) and experimental results of the resonator with and without coating, significant difference of both cases is evident in the spacing of the parallel resonance frequencies (SPRFs), effective coupling coefficient ( {k}_{\text {eff}}^{{2}} ), and quality factor distribution of the resonator. The acoustic velocity of the coated material (SU-8) is calculated from the new periodicity introduced in the SPRF distribution. The SPRF distribution of the SU-8-coated resonator decreases overall as expected due to the additional layer introduced but sharply increases in regions defined by the thickness and acoustic velocity of the SU-8 layer. The mechanical loss of the added layer has significant effect on the parameters of the resonator. The study reveals that this method of characterization can be used to approximate the mechanical loss of materials such as polymers or polymer composites. The simulation with finite-element method agrees with the experimental result.