Statistics for Possible gas-phase reactions of H < inf > 2 < /inf > CH < inf > 4 < /inf > / tetramethylsilane in diamond/β-SiC nanocomposite film deposition: An ab-initio study

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Possible gas-phase reactions of H < inf > 2 < /inf > CH < inf > 4 < /inf > / tetramethylsilane in diamond/β-SiC nanocomposite film deposition: An ab-initio study 0

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