Design and analysis of Solidly Mounted Resonator utilising a conductive Bragg reflector to improve Q and resonant frequency

Abstract

This paper reports the performance of a Solidly Mounted Resonators (SMR) that uses metal Bragg reflectors consisting of Aluminium (Al) and Tungsten (W) reflectors. Results concerning number of Bragg reflector pairs (Al/W) versus resonant frequency and quality factor are reported. This paper also reports the advantages of conductive SMR over conventional SMRs. The main advantages of the proposed design are the substantially reduced electrode resistance (and hence higher Q), the utilization of the full piezoelectric coupling at high frequencies as well as expected improvement in power handling capabilities due to lower dissipation and improved heat conductivity. © 2012 IEEE.