A Highly Tunable Barium Strontium Titanate Thin Film MIM Varactor with Floating Metal
A Highly Tunable Barium Strontium Titanate Thin Film MIM Varactor with Floating Metal
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Date
2021-12-01
Authors
Nath, Surajit Kumar
Goud, J. Pundareekam
Kongbrailatpam, Sandeep Sharma
Rajaram, Guruswamy
Raju, K. C.James
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Abstract
A ferroelectric metal insulator metal (MIM) varactor structure incorporating a floating metal and coplanar waveguide (CPW) has been introduced here. The work of the proposed varactor is based on the field-dependent material properties of (Ba, Sr) TiO3 (BST) thin film. A capacitance tunability of 44% has been achieved for the bias voltage of 0-10 V over a frequency range of 1-3 GHz. The proposed varactor structure yields a compact area, high capacitance density, and reduced mask process (two masks).
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Keywords
(BaSr) TiO₃ (BST) thin film,
equivalent circuit,
ferroelectric material,
tunable microwave device,
varactor
Citation
IEEE Microwave and Wireless Components Letters. v.31(12)