Thermodynamic aspects of diamond/β-SiC composite films

Abstract

A thermodynamic equilibrium analysis involving H2-CH 4-Si(CH3)4 (tetramethylsilane, TMS) gas mixtures is made to understand the evolution of major gas-phase species and to predict the solid-phase co-deposition of diamond and β-SiC phases. The equilibrium compositions are analyzed at the practical deposition conditions of nanocrystalline diamond/β-SiC composite films. The influence of various predominant species on the equilibrium compositions is investigated. © 2008 WILEY-VCH Verlag GmbH & Co. KGaA.