Ion beam modifications and characterisation of semiconductor heterostructures

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Date
2004-12-01
Authors
Siddiqui, Azher M.
Dhamodaran, S.
Nageswara Rao, S. V.S.
Sathish, N.
Pathak, Anand P.
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Abstract
Strained Layer Superlattices (SLS) have unique electronic and opto-electronic properties and find wide ranging applications in many frontier areas of science and technology. This paper reviews the experimental work on the characterisation and Swift Heavy Ion (SHI) induced modifications on semiconductor heterostructures. An overview of our experiments namely, Rutherford Backscattering Spectrometry/Channelling, Elastic Recoil Detection Analysis, High Resolution X-Ray Diffraction and Ion Beam Mixing, will be discussed. Copyright ©2004 by Society for Advancement of Heat Treatment & Surface Engineering (SAHTSE).
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Proceedings of the International Conference on Advances in Surface Treatment: Research and Applications, ASTRA. v.2004